To provide a vacuum chuck device capable of obtaining sufficient positional precision when fixing a workpiece.

This vacuum chuck device includes: a support part 22; a suction part 24 provided on the support part 22 and loading a workpiece 40 on it, a vacuum hole 26 provided integrally between the support part 22 and the suction part 24; a suction hole 24a for suction formed in the suction part 24 and communicating with the vacuum hole 26; an exhaust port 22a formed in the support part 22, communicating with the vacuum hole 26, and connected with an exhaust means 28; a suction hole 24b for positioning provided in the suction part 24 along internal wall lines W1, W2 on two sides constituting a bent part B of the vacuum hole 22 and communicating with the vacuum hole 26; and guide members 30, 32 provided on outer side of the internal wall lines W1, W2 on two sides on the suction part 24 to position the workpiece 40.