Title:
VACUUM EXHAUST DEVICE AND METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2002188589
Kind Code:
A
Abstract:
To provide a vacuum air exhaust device capable of suppressing the reduction of lubricity in a pump and running out of oil film and reducing cost and having high reliability and excellent maintenance property even when using a large amount of corrosive gas repeatedly for many hours for mass production.
In this vacuum air exhaust device having an oil rotation pump as an air exhaust means, an oil supply means is provided in a suction side path of the oil rotation pump to supply oil to the suction side path from the oil supply means, and the pump is operated while supplying oil into a cylinder to exhaust air.
More Like This:
| WO/2014/083305 | VACUUM PUMP |
Inventors:
IZAWA HIROSHI
Application Number:
JP2000388868A
Publication Date:
July 05, 2002
Filing Date:
December 21, 2000
Export Citation:
Assignee:
CANON KK
International Classes:
F04C25/02; C23C16/44; C23C16/455; F04C23/00; F04C29/00; F04C29/02; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): F04C25/02; C23C16/44; C23C16/455; F04C29/02; H01L21/205; H01L21/3065
Attorney, Agent or Firm:
Nobuyuki Kaneda (2 others)