Title:
ターボ分子ポンプを用いた真空排気装置
Document Type and Number:
Japanese Patent JP4152121
Kind Code:
B2
Inventors:
Takami Ozaki
Application Number:
JP2002133693A
Publication Date:
September 17, 2008
Filing Date:
May 09, 2002
Export Citation:
Assignee:
ntn corporation
International Classes:
F04B39/00; F04D19/04
Domestic Patent References:
| JP2001241393A | ||||
| JP10061722A | ||||
| JP8031280A | ||||
| JP8234847A | ||||
| JP1172631A | ||||
| JP8128498A | ||||
| JP2000195153A |
Foreign References:
| WO2000014427A1 |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Hiroyuki Yoshida
Hidehiko Ito
Toshio Morita
Hiroyuki Yoshida
Hidehiko Ito