Title:
真空排気システム
Document Type and Number:
Japanese Patent JP6522892
Kind Code:
B2
Inventors:
Atsushi Shiokawa
Tetsuro Sugiura
Shinichi Sekiguchi
Takashi Kyotani
Tetsuo Komai
Norio Kimura
Keiichi Ishikawa
Tetsuro Sugiura
Shinichi Sekiguchi
Takashi Kyotani
Tetsuo Komai
Norio Kimura
Keiichi Ishikawa
Application Number:
JP2014112480A
Publication Date:
May 29, 2019
Filing Date:
May 30, 2014
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04B37/16
Domestic Patent References:
| JP2004218648A | ||||
| JP10063301A | ||||
| JP10137545A | ||||
| JP2001298018A | ||||
| JP10057798A |
Attorney, Agent or Firm:
Isamu Watanabe
Tetsuya Hirosawa
Tetsuya Hirosawa