Title:
真空排気システム
Document Type and Number:
Japanese Patent JP6594638
Kind Code:
B2
Inventors:
Toru Osuka
Application Number:
JP2015063238A
Publication Date:
October 23, 2019
Filing Date:
March 25, 2015
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04B37/16; F04B49/06
Domestic Patent References:
| JP10063301A | ||||
| JP3279694A | ||||
| JP2009534574A | ||||
| JP2005180279A |
Attorney, Agent or Firm:
Isamu Watanabe
Tetsuya Hirosawa
Tetsuya Hirosawa