To provide a vacuum freezing drying device to perform cooling freezing, heating sublimation, and temperature regulation in a short time with extremely high precision without needing conventional large separate equipment serving as a heating means and a cooling means for an object in a vacuum.

The vacuum freezing drying device is constituted that a cooling heating device A situated rapidly cooling heating regulatably by a Peltier element is provided with a vacuum drying chamber 2 in which an object 1 to be dried is installed at a cooling heating device A, meanwhile, a cooling heating device B situated in a manner to be rapidly regulatably cooled and heated by the Peltier element is provided with a vacuum chamber-form cold trap 4 consisting of a heat transfer part 5 to effect frost and defrost of a sublimation moisture content and a drain circuit 6, etc., an exhaust vacuum circuit 7 is connected to the cold trap 4, and the vacuum drying chamber 2 of the cooling heating device A and the cold trap 4 of the cooling heating device B are interconnected through an exhaust vacuum circuit 3.