Title:
真空炉
Document Type and Number:
Japanese Patent JP6945115
Kind Code:
B2
Abstract:
To provide a vacuum furnace capable of measuring the temperature of workpieces in a plurality of treatment chambers without interruption.SOLUTION: A vacuum furnace comprises: a first treatment chamber 10 for treating a workpiece 1; a second treatment chamber 20 having an air-tight performance capable of treating the workpiece 1 in a decompression environment; an intermediate space 30 provided between the first treatment chamber 10 and the second treatment chamber 20 and having an air-tight performance similar to that of the second treatment chamber 20; a temperature measurement line 40 passing through the intermediate space 30 so as to reach the first treatment chamber 10 and the second treatment chamber 20 respectively and capable of measuring the temperature of the workpiece 1 present at the first treatment chamber 10 or the second treatment chamber 20 in accordance with the step of treatment; a first air-tight door 15 capable of air-tightly separating the first treatment chamber 10 and the intermediate space 30; and a second air-tight door 25 capable of air-tightly separating the intermediate space 30 and the second treatment chamber 20.SELECTED DRAWING: Figure 1
Inventors:
Osamu Sakamoto
Application Number:
JP2019221990A
Publication Date:
October 06, 2021
Filing Date:
December 09, 2019
Export Citation:
Assignee:
Sun Furness Co., Ltd.
International Classes:
F27B9/40; C21D1/63; C21D1/773; F27B9/02; F27D7/06; F27D19/00; F27D21/00; G01K1/14
Domestic Patent References:
| JP2005009702A | ||||
| JP2016108584A | ||||
| JP2008266729A |
Foreign References:
| WO2009084335A1 |
Attorney, Agent or Firm:
Naoyuki Morimoto