Title:
真空ゲート弁
Document Type and Number:
Japanese Patent JP6312428
Kind Code:
B2
Abstract:
The valve has a displacement element (16) exerting a force onto a sliding part (14) with force components in a longitudinal closing direction (z) and a transverse closing direction (y) during linear displacement of the element in the longitudinal closing direction to displace the sliding part from a first position (PO) into a second position, and from the second position into a third position. The sliding part is slid in the transverse closing direction into the third position by the linear displacement with the sliding part blocked in the longitudinal closing direction in the second position.
Inventors:
Thomas Brecha
Application Number:
JP2013272305A
Publication Date:
April 18, 2018
Filing Date:
December 27, 2013
Export Citation:
Assignee:
Bat holding arg
International Classes:
F16K3/18; F16K51/02
Domestic Patent References:
| JP11351419A | ||||
| JP2010534301A | ||||
| JP7004966U |
Attorney, Agent or Firm:
Einzel Felix-Reinhard
Takuya Kuno
Takuya Kuno