Title:
VACUUM GAUGE AND CONTAMINATION DIAGNOSIS METHOD
Document Type and Number:
Japanese Patent JP2016033509
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum gauge capable of accurately diagnosing the contamination level of the vacuum gauge with a simple structure, and a contamination diagnosis method capable of accurately diagnosing the contamination level of the vacuum gauge with a simple procedure.SOLUTION: A vacuum gauge has a normal operation mode and a contamination diagnosis mode. Provided is a cold-cathode ionization gauge that includes: an anode 1 and a cathode 3 for measuring vacuum pressure in the normal operation mode; an anode 7 and the cathode 3 for measuring vacuum pressure in the contamination diagnosis mode; and a controller 10 comparing the current measured between the anode 7 and the cathode 3 with the current measured between the anode 1 and the cathode 3.SELECTED DRAWING: Figure 1
More Like This:
Inventors:
YOSHIDA HAJIME
Application Number:
JP2015112612A
Publication Date:
March 10, 2016
Filing Date:
June 02, 2015
Export Citation:
Assignee:
NAT INST OF ADVANCED IND SCIEN
International Classes:
G01L21/34; G01L21/32; G01L27/00
Previous Patent: DROPLET DETECTION SHEET
Next Patent: DETECTION ELECTRODE OF GAS SENSOR, MANUFACTURING METHOD OF CONDUCTIVE PASTE AND GAS SENSOR
Next Patent: DETECTION ELECTRODE OF GAS SENSOR, MANUFACTURING METHOD OF CONDUCTIVE PASTE AND GAS SENSOR