To provide a vacuum heat treatment furnace that controls flow of cooling gas, uniformly cools an entire heat treating object installed in a treating chamber by rectifying the cooling gas to a uniform speed, and improves cooling efficiency.
This vacuum heat treatment furnace 10A is equipped with the treating chamber 13 for heating the heat treating object 11 and cooling the heated heat treating object 11 by cooling gas 12. The vacuum heat treatment furnace 10A includes: a gas supply part 14 provided on the upper side of the treating chamber 13 and supplying the cooling gas 12 to the treating chamber 13; a gas discharge part 15 provided at the lower side of the treating chamber 13 and discharging the cooling gas 12 from the treating chamber 13; and a guide member 16A for making the cooling gas 12 to flow uniformly to the heat treating object 11 and cooling the heat treating object 11 uniformly.
OTANI YUICHI
TANIMOTO KOICHI
Next Patent: AIR CONDITIONING DEVICE AND POWER GENERATING DEVICE