Title:
VACUUM PERIPHERAL VESSEL AND METHOD FOR FORMING A VACUUM THEREIN
Document Type and Number:
Japanese Patent JP3896686
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve the degree of vacuum of a field emission device by baking effectively the interior of a vacuum peripheral vessel to drive out remaining gases before forming a vacuum therein.
SOLUTION: In this vacuum vessel comprising a cathode side substrate 2 on which a field emission element is formed and anode side substrates 1 which are arranged with a prescribed spacing, the vacuum forming method comprises the steps of: providing at least two or more opening parts on the vacuum peripheral vessel before sealing it, baking and driving out remaining gases by flowing through a high-temperature gas in the vessel in a process prior to a process of forming a vacuum in the vessel, and then sealing the opening(s) except one opening and at the same time forming vacuum in the vessel using the remaining opening.
Inventors:
Shigeo Ito
Gentaro Tanaka
Mikio Yokoyama
Takeshi Tonegawa
Gentaro Tanaka
Mikio Yokoyama
Takeshi Tonegawa
Application Number:
JP8112498A
Publication Date:
March 22, 2007
Filing Date:
March 27, 1998
Export Citation:
Assignee:
Futaba Electronics Co., Ltd.
International Classes:
H01J9/385; H01J5/02; H01J9/39; H01J29/86; H01J29/94; H01J31/12; (IPC1-7): H01J5/02; H01J9/385; H01J9/39; H01J29/86; H01J31/12
Domestic Patent References:
| JP9320493A | ||||
| JP10064429A | ||||
| JP4245138A | ||||
| JP4104428A | ||||
| JP9306394A | ||||
| JP5234512A |
Attorney, Agent or Firm:
Atsuo Waki
Yasuo Asami
Hideo Takahashi
Yasuo Asami
Hideo Takahashi
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