Title:
真空処理装置及び帯状気流形成装置
Document Type and Number:
Japanese Patent JP4584821
Kind Code:
B2
Inventors:
Kengo Ashizawa
Application Number:
JP2005360781A
Publication Date:
November 24, 2010
Filing Date:
December 14, 2005
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/677; C23C16/44; F24F9/00; H01L21/02; H01L21/027; H01L21/3065
Domestic Patent References:
| JP2003007799A | ||||
| JP2001127030A | ||||
| JP2002355545A | ||||
| JP2003115519A | ||||
| JP2003329280A | ||||
| JP11003867A | ||||
| JP11063604A | ||||
| JP2000357641A | ||||
| JP2005197487A | ||||
| JP2006286682A |
Attorney, Agent or Firm:
Filial piety Sasaki