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Patent Searching and Data


Title:
真空処理装置
Document Type and Number:
Japanese Patent JP4515630
Kind Code:
B2
Inventors:
Kimio Kogure
Application Number:
JP2000400992A
Publication Date:
August 04, 2010
Filing Date:
December 28, 2000
Export Citation:
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Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
B01J3/00; B65G49/00; B01J3/02; B01J3/03; C23C14/56; G11B7/26; H01L21/203; H01L21/302; H01L21/3065
Domestic Patent References:
JP2000313959A
JP2000334290A
JP10280131A
JP8107072A
JP63001035A
JP11165058A
JP11090208A
Attorney, Agent or Firm:
Kazuo Sato
Hiroyuki Nagai
Junpei Okada
Satoshi Nazuka