Title:
真空処理装置
Document Type and Number:
Japanese Patent JP4515630
Kind Code:
B2
More Like This:
Inventors:
Kimio Kogure
Application Number:
JP2000400992A
Publication Date:
August 04, 2010
Filing Date:
December 28, 2000
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
B01J3/00; B65G49/00; B01J3/02; B01J3/03; C23C14/56; G11B7/26; H01L21/203; H01L21/302; H01L21/3065
Domestic Patent References:
JP2000313959A | ||||
JP2000334290A | ||||
JP10280131A | ||||
JP8107072A | ||||
JP63001035A | ||||
JP11165058A | ||||
JP11090208A |
Attorney, Agent or Firm:
Kazuo Sato
Hiroyuki Nagai
Junpei Okada
Satoshi Nazuka
Hiroyuki Nagai
Junpei Okada
Satoshi Nazuka