Title:
真空ポンプの堆積物の解析装置、真空ポンプシステムおよび解析プログラム
Document Type and Number:
Japanese Patent JP7459711
Kind Code:
B2
Abstract:
To provide information of an amount of a deposited material which deposited in a vacuum pump, with simple processing.SOLUTION: An analysis apparatus for a deposited material in a vacuum pump includes an information producing part which produces information about the amount of a material deposited in a flow channel of the vacuum pump on the basis of first data acquired from the vacuum pump discharging air. The first data is data indicative of time variation of an operation of a heating part disposed in the vacuum pump.SELECTED DRAWING: Figure 4
Inventors:
Haruhiko Sakai
Application Number:
JP2020129456A
Publication Date:
April 02, 2024
Filing Date:
July 30, 2020
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
F04D19/04
Domestic Patent References:
| JP2020012423A | ||||
| JP2005273637A |
Attorney, Agent or Firm:
Takuji Yamashita