Title:
真空ポンプ排出装置
Document Type and Number:
Japanese Patent JP2006509952
Kind Code:
A
Abstract:
A vacuum pumping arrangement comprises a drive shaft, a motor for driving said drive shaft, a molecular pumping mechanism and a regenerative pumping mechanism. The drive shaft is arranged for simultaneously driving the molecular pumping mechanism and the regenerative pumping mechanism. The drive shaft is supported by a lubricant free bearing associated with the molecular pumping mechanism.
Inventors:
Scofield Nigel Paul
Application Number:
JP2004559873A
Publication Date:
March 23, 2006
Filing Date:
December 09, 2003
Export Citation:
Assignee:
The BOC Group plc
International Classes:
F04D19/04; F04D23/00; F04D29/04; F04D29/056; F04D29/058
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Shishido Kaichi
Village shrine Atsuo
Disciple Maru Ken
Ino Sato
Fumiaki Otsuka
Shishido Kaichi
Village shrine Atsuo
Disciple Maru Ken
Ino Sato