Title:
真空ポンプ及び該真空ポンプに備えられた保護部
Document Type and Number:
Japanese Patent JP7347964
Kind Code:
B2
Abstract:
A vacuum pump in which a spark is not generated even when a rotor component and a stator component are brought into contact, and an explosive reaction in a vacuum container can be prevented, and a protection portion provided in the vacuum pump are provided. On head part sides of a thread ridge to a thread ridge of a threaded spacer with a narrow clearance of a gas channel therebetween, a protection portion 1a to a protection portion made of non-metal are formed in a peripheral state. A protection portion is similarly formed in the peripheral state also on an inner peripheral surface side of a stator blade spacer opposed to a distal end of a rotor blade with a narrow clearance of the gas channel. The protection portion is formed of non-metal with a sufficient thickness so that metal materials of base materials are not brought into contact with each other even when a rotor blade and a stationary portion are brought into contact with each other.
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Inventors:
Yoshihiro Enomoto
Takeshi Kabasawa
Takeshi Kabasawa
Application Number:
JP2019101785A
Publication Date:
September 20, 2023
Filing Date:
May 30, 2019
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04
Domestic Patent References:
| JP2005180265A | ||||
| JP5240188A | ||||
| JP55025658U | ||||
| JP2007170537A | ||||
| JP10252683A | ||||
| JP53076372U | ||||
| JP2008223573A |
Attorney, Agent or Firm:
Masatoshi Shiina