Title:
除害機能付真空ポンプ
Document Type and Number:
Japanese Patent JP6472653
Kind Code:
B2
Abstract:
A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a pair of multistage pump rotors each of which comprises a plurality of rotors arranged on a rotating shaft, and the at least one abatement part is connected to an interstage of the multistage pump rotors.
Inventors:
Koichi Iwasaki
Takumi Furuta
Keiichi Ishikawa
Tetsuo Komai
Shinichi Sekiguchi
Takumi Furuta
Keiichi Ishikawa
Tetsuo Komai
Shinichi Sekiguchi
Application Number:
JP2014259614A
Publication Date:
February 20, 2019
Filing Date:
December 23, 2014
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04C25/02; C23C14/00; C23C16/44; F04B37/16; F04C23/00; H01L21/205; H01L21/3065
Domestic Patent References:
| JP5079488A | ||||
| JP7506289A | ||||
| JP11005013A | ||||
| JP6047269A | ||||
| JP4132895A |
Attorney, Agent or Firm:
Isamu Watanabe
Tetsuya Hirosawa
Tetsuya Hirosawa