Title:
Vacuum pump
Document Type and Number:
Japanese Patent JP6147988
Kind Code:
B2
Inventors:
Yoshinobu Otachi
Yasushi Maejima
Tsutomu Takaada
Yasushi Maejima
Tsutomu Takaada
Application Number:
JP2012246278A
Publication Date:
June 14, 2017
Filing Date:
November 08, 2012
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04
Domestic Patent References:
| JP2012017672A | ||||
| JP64019198A | ||||
| JP2006038242A |
Foreign References:
| WO2011111209A1 |
Attorney, Agent or Firm:
Shigenori Wada
Hidehiko Komatsu
Hidehiko Komatsu