Title:
真空システム
Document Type and Number:
Japanese Patent JP6490759
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum system enabling simple and/or flexible operation and/or having reliability, and a simple and/or flexible method for operating the vacuum system.SOLUTION: An assembly comprises: a vacuum system, especially a vacuum pump, or at least one vacuum equipment, preferably a vacuum pump; and at least one recipient, preferably a vacuum chamber or a measuring instrument such as an electron microscope. The assembly has a work region, a separation mechanism and a control chamber. The control chamber is separated from the work region by the separation mechanism. In the control chamber, control pressure capable of relatively changing to pressure in the work region is occupied. By change of the control pressure with the separation mechanism, work motion in the work region can be executed.SELECTED DRAWING: Figure 1
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Inventors:
Martin Rose
Michael Schweighoefer
Tobias Stol
Jan Hoffman
Michael Schweighoefer
Tobias Stol
Jan Hoffman
Application Number:
JP2017155074A
Publication Date:
March 27, 2019
Filing Date:
August 10, 2017
Export Citation:
Assignee:
Pfeiffer Vacuum Game Behr
International Classes:
F04D19/04; F04B37/16
Domestic Patent References:
| JP200985242A | ||||
| JP2001329996A | ||||
| JP2006517291A | ||||
| JP2011185094A | ||||
| JP200281397A | ||||
| JP2008095504A | ||||
| JP2009103138A | ||||
| JP11303791A | ||||
| JP2016522352A |
Attorney, Agent or Firm:
Mitsufumi Esaki
Blacksmith
Atsushi Shinohara
Shinsuke Nakamura
Kiyota Eisho
Blacksmith
Atsushi Shinohara
Shinsuke Nakamura
Kiyota Eisho