VACUUM TREATING APPARATUS

Title:

VACUUM TREATING APPARATUS

Document Type and Number:

Japanese Patent JPH06275703

Kind Code:

A

Abstract:

PURPOSE: To provide a vacuum treating apparatus for baking a vessel body for constituting a vacuum vessel and a lower plate for blocking an opening of the body by heating from an outer surface.

CONSTITUTION: A vacuum treating apparatus comprises a vacuum vessel 1 for receiving and conveying a material to be treated such as a wafer, etc., a load locking chamber 10 connectible to the vessel 1 to deliver and receive the material to and from the vessel 1, and a vacuum processing chamber connected to the chamber 10 through a gate valve to vacuum-process the material. The apparatus also comprises a vessel body heater 4 for heating the body of the vessel 1 from its outer surface, and a lower plate heater 20 for heating a lower plate 3 for openably blocking a lower opening of the vessel from its outer surface.

Inventors:

KONDO FUMIO
TAKEUCHI NORIYUKI
MATSUMURA MASAO

Application Number:

JP8934293A

Publication Date:

September 30, 1994

Filing Date:

March 24, 1993

Export Citation:

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Assignee:

EBARA CORP

International Classes:

H01L21/324; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; H01L21/324

Attorney, Agent or Firm:

Isamu Watanabe (1 person outside)

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