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Title:
VACUUM TREATMENT METHOD
Document Type and Number:
Japanese Patent JP2014224635
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To enable keeping efficient operation even if heating/cooling treatments at different temperatures are necessary in a tempering, vacuum sintering/aging or the like.SOLUTION: A vacuum treatment method in vacuum treatment facilities including: a plurality of vacuum heating chambers 3A and 3B; a single gas cooling chamber 5; and a vertical lift 4 conveying a workpiece between these vacuum heating chambers 3A and 3B and the gas cooling chamber 5, comprises: setting temperatures of the vacuum heating chambers 3A and 3B to different constant temperatures, respectively; selecting one of the vacuum heating chambers 3A and 3B at the temperature suited for a workpiece heating treatment; and conveying the workpiece to the selected vacuum heating chamber 3A or 3B.

Inventors:
MATSUI KOJI
ISHIHAMA KATSUNORI
MARUYAMA TAKASHI
AKAO MASAMITSU
SHIBATA KEI
HORI TOORU
Application Number:
JP2013103591A
Publication Date:
December 04, 2014
Filing Date:
May 16, 2013
Export Citation:
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Assignee:
DAIDO STEEL CO LTD
International Classes:
F27B5/14; F27B5/02; F27B5/05; F27B5/18; F27D3/06
Attorney, Agent or Firm:
Ken-ichi Morita