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Title:
VACUUM TWEEZERS FOR CHIP PART MOUNTING MACHINE
Document Type and Number:
Japanese Patent JPS61284994
Kind Code:
A
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Inventors:
IKEBE HIROO
MATSUOKA AKIRA
Application Number:
JP12505385A
Publication Date:
December 15, 1986
Filing Date:
June 11, 1985
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01L21/677; B25J15/06; H01L21/67; H01L21/68; H05K3/30; H05K13/04; (IPC1-7): B25J15/06; H01L21/68; H05K3/30; H05K13/04
Attorney, Agent or Firm:
Koji Hoshino



 
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