Title:
VACUUM VALVE
Document Type and Number:
Japanese Patent JPH06346975
Kind Code:
A
Abstract:
PURPOSE: To restrain the abrasion of a rolling diaphragm provided in the valve operating chamber of a vacuum valve to be driven by vacuum.
CONSTITUTION: A plunger 30 is slidably arranged in a first housing 21 and a second housing 22, and a valve operating chamber 25 to be made in the vacuum state so that this plunger 30 may slide is provided in the housings 21, 22. The valve operating chamber 25 is isolated in airtight state in the housings 21, 22 by the rolling diaphragm 31 arranged between the outer peripheral surface of the plunger 30 and the inner peripheral surface of the second housing 22. Lubricant is mixed by kneading in the rolling diaphragm 31, and the lubricant always seeps out on the front surface.
Inventors:
YAMABE YASUO
Application Number:
JP13576593A
Publication Date:
December 20, 1994
Filing Date:
June 07, 1993
Export Citation:
Assignee:
SEKISUI CHEMICAL CO LTD
International Classes:
E03F3/02; E03F7/02; F16K7/18; F16K51/02; G05D9/04; (IPC1-7): F16K7/18; E03F3/02; E03F7/02; F16K51/02; G05D9/04
Domestic Patent References:
| JPH02503128A | 1990-09-27 |
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