Title:
VAPOR DEPOSITING DEVICE FOR CHARGED CORPUSCULAR RAYS
Document Type and Number:
Japanese Patent JPS53109881
Kind Code:
A
Abstract:
PURPOSE: To prevent for falling of flakes from a main shutter down to a deposition source by means of a sub-shutter, by mounting a rotatable main shutter and sub-shutter between a deposition source and a sample.
Inventors:
SHIMIZU NOBUO
Application Number:
JP2479177A
Publication Date:
September 26, 1978
Filing Date:
March 09, 1977
Export Citation:
Assignee:
HITACHI LTD
International Classes:
C23C14/24; C23C14/22; C23C14/56; (IPC1-7): C23C13/08; H01L21/203