To provide a vapor drying device and method for an optical element, capable of quickly and properly drying the optical element and reducing consumption of a solvent.
This vapor drying device 1 includes a vapor drying vessel section 2A filled with solvent vapor 5A to perform a vapor drying treatment on the optical element 12a, a cooling pipe 6 for cooling the solvent vapor 5A at an upper section of the vapor drying vessel section 2A, a heating drying vessel section 2B disposed at an upper side of the vapor drying vessel section 2A through the cooing pipe 6 to perform a heating drying treatment on the optical element 12a on which the vapor drying treatment is performed in the vapor drying vessel section 2A, and a cooling pipe 10 for cooling the solvent vapor 5B passing through the heating drying vessel section 2B at an upper side of the heating drying vessel section 2B.
Masatake Shiga
Suzuki Mitsuyoshi
Tadao Takashiba
Hiroshi Masui
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