PURPOSE: To stably produce Ta or Nb powder having high purity and good distribution of particle size at good productivity and low cost by making halogenide of Ta or Nb particle with halogen gas at the specific temp. and executing vapor phase reduction to this with hydrogen at the prescribed temp.
CONSTITUTION: Packing layer 13 composing of the Ta or Nb particle having low purity and 100W500μm particle size, is arranged in a reaction tube 11 of a chloride generating furnace 12. This packing layer 13 is brought into contact with the mixed gas of inert gas of Ar, etc., and 9W50vol.% halogen gas while holding at 200W600°C. By this method, steam containing Ta or Nb halogenide is obtd. This steam is passed through the reducing reaction furnace 14 and reduced with hydrogen gas supplying from the line 15 at 800W1,100°C. The Ta or Nb powder produced with the above process is collected with a recovery filter 16 and recovered and hydrogen halide gas is absorbed and removed with an absorption tower 17.
IZAWA HIROSUMI
HANAWA KENZO
SAITO HIROSHI
SHOWA KIYABOTSUTO SUUPAA METAL
SAITO HIROSHI
| JP39009664A | ||||
| JP32002358A | ||||
| JPS4833125A | 1973-05-08 | |||
| JPS6223912A | 1987-01-31 |
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