Title:
ベーパライザおよびこれを備える流体供給装置
Document Type and Number:
Japanese Patent JP7210365
Kind Code:
B2
Abstract:
To provide a vaporizer excellent in durability, and a fluid supply device comprising the vaporizer.SOLUTION: A vaporizer according to the present disclosure comprises an outer wall extending in a first direction directed from a first end toward a second end, a vaporization part through which fluid flows in the first direction inside the outer wall, and a heating part. The outer wall is made of ceramic. A fluid according to the present disclosure comprises the vaporizer, a first flow passage located upstream of the vaporizer, and a second flow passage located downstream of the vaporizer.SELECTED DRAWING: Figure 1
Inventors:
Takeshi Souseki
Application Number:
JP2019077129A
Publication Date:
January 23, 2023
Filing Date:
April 15, 2019
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
F02M21/06
Domestic Patent References:
| JP2006348916A |
Foreign References:
| KR1020100067936A | ||||
| US20070107879 | ||||
| WO2017220340A1 |
Attorney, Agent or Firm:
Sakai International Patent Office