Title:
イオンソース用ベーパライザ
Document Type and Number:
Japanese Patent JP4325852
Kind Code:
B2
Abstract:
A vaporizer is provided for delivering a solid source, such as arsenic for example that is vaporized in a crucible, into an arc chamber through a nozzle. The vaporizer includes a nozzle formed with a gas inlet port formed in upward orientation and located downward from the upper end of the inner surface of the crucible. Here, when the crucible has an inner diameter of 26 mm for example, the gas inlet port is preferably formed at a position approximately 1.1 mm below the upper end of the inner surface of the crucible, thereby facilitating the introduction of the gas from the gas inlet port and preventing clogging of the nozzle.
Inventors:
Kazuhiro Taniguchi
Application Number:
JP2003327241A
Publication Date:
September 02, 2009
Filing Date:
September 19, 2003
Export Citation:
Assignee:
oki Semiconductor Co., Ltd.
oki Semiconductor Miyazaki Co., Ltd.
oki Semiconductor Miyazaki Co., Ltd.
International Classes:
H01J27/02; H01J27/00; H01J37/08
Domestic Patent References:
| JP9007535A | ||||
| JP2024942A | ||||
| JP64016051U | ||||
| JP61148748A | ||||
| JP3086558U |
Foreign References:
| WO2001043157A1 |
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara
Tetsuo Kanamoto
Koji Hagiwara