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Title:
VAPORIZER
Document Type and Number:
Japanese Patent JP2022032260
Kind Code:
A
Abstract:
To generate stably a vaporization raw material.SOLUTION: Each heater 40 heats carrier gas passing through each gap 54 by heat generation from each heater element R. The carrier gas passing through each gap 54 is introduced into each hole 82h of an upstream side spacer 82, and a raw material 81 is vaporized by the carrier gas introduced into each hole 82h. Vaporized raw material generated by vaporizing the raw material 81 is discharged from a discharge port 37 toward the surface of a substrate to be processed. Thus, since the carrier gas passing through each gap 54 is heated directly by heat from each heater element R, the vaporized raw material can be generated stably.SELECTED DRAWING: Figure 6

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Inventors:
TSURUGA TOSHIKAZU
BANDO HIROSHI
ITO AKIHIRO
KOKETSU MASAYUKI
Application Number:
JP2020135865A
Publication Date:
February 25, 2022
Filing Date:
August 11, 2020
Export Citation:
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Assignee:
CKD CORP
International Classes:
C23C16/448; H05B3/10; H05B3/12
Domestic Patent References:
JP2013508968A2013-03-07
JP2018522393A2018-08-09
JPH07240384A1995-09-12
JP2001223257A2001-08-17
JP2006144049A2006-06-08
JP2002056952A2002-02-22
JPS5322829Y11978-06-14
JPS63278224A1988-11-15
Foreign References:
WO2020026845A12020-02-06
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda



 
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