Title:
ＲＦ電力アプリケーションのための可変電力用コンデンサ
Document Type and Number:
Japanese Patent JP6820832
Kind Code:
B2
Abstract:
A power capacitor (7) is described for use in an RF power delivery system. The power capacitor comprises at least two RF electrodes (18, 19) separated by a capacitor dielectric (17) comprising a solid paraelectric dielectric material whose relative permittivity is controllable by varying a DC bias voltage applied across the dielectric (17) at DC bias electrodes (10, 26, 28). Composite capacitor configurations, an RF power system and a method of controlling the power capacitor are also described.
Inventors:
Abrecht, microphone
Fink, Thomas
Bigler, walter
Fink, Thomas
Bigler, walter
Application Number:
JP2017507446A
Publication Date:
January 27, 2021
Filing Date:
September 04, 2014
Export Citation:
Assignee:
Comet Age
International Classes:
H01G7/06; H01G4/30; H01G4/38; H05H1/46
Domestic Patent References:
| JP201269580A |
Foreign References:
| WO2013061730A1 |
Attorney, Agent or Firm:
Takahashi Hayashi & Partners