Title:
VARIABLE CAPACITOR
Document Type and Number:
Japanese Patent JP2018207059
Kind Code:
A
Abstract:
To restrain dielectric breakdown of a dielectric film.SOLUTION: A variable capacitor includes a substrate 10, a lower electrode 12 provided on the substrate, a dielectric film 14 provided on the lower electrode and containing a perovskite structure compound, and multiple upper electrodes 16 provided for a single lower electrode on the dielectric film, and connected in parallel with each other. Grooves corresponding to the multiple upper electrodes are provided in the dielectric film, and on the boundary surface of the dielectric film and the multiple upper electrodes, lateral faces of the multiple upper electrodes are continuous to the lateral faces of the grooves, and the lateral faces of the multiple upper electrodes and the grooves on the boundary surface are inclining so that the width of the upper electrodes becomes narrower than the width of the dielectric film.SELECTED DRAWING: Figure 1
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Inventors:
MATSUI KANA
Application Number:
JP2017114087A
Publication Date:
December 27, 2018
Filing Date:
June 09, 2017
Export Citation:
Assignee:
TAIYO YUDEN KK
International Classes:
H01G7/06
Attorney, Agent or Firm:
Shuhei Katayama