Title:
幅可変光学スリット機構
Document Type and Number:
Japanese Patent JPWO2002066941
Kind Code:
A
Inventors:
Hoshino Glory
Application Number:
JP2002001431W
Publication Date:
August 29, 2002
Filing Date:
February 19, 2002
Export Citation:
Assignee:
ADVANTEST CORP.
International Classes:
(IPC1-7): G01J3/04
Attorney, Agent or Firm:
稲垣 稔
草野 卓
草野 卓
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