Title:
Variety ion source
Document Type and Number:
Japanese Patent JP6238978
Kind Code:
B2
Abstract:
A high brightness ion source with a gas chamber includes multiple channels, wherein the multiple channels each have a different gas. An electron beam is passed through one of the channels to provide ions of a certain species for processing a sample. The ion species can be rapidly changed by directing the electrons into another channel with a different gas species and processing a sample with ions of a second species. Deflection plates are used to align the electron beam into the gas chamber, thereby allowing the gas species in the focused ion beam to be switched quickly.
Inventors:
Gregory A. Shwind
N William Parker
N William Parker
Application Number:
JP2015520195A
Publication Date:
November 29, 2017
Filing Date:
May 24, 2013
Export Citation:
Assignee:
F-I-I Company
International Classes:
H01J27/20; H01J37/08; H01J37/317
Domestic Patent References:
| JP2007227381A |
Foreign References:
| US20090200484 |
Attorney, Agent or Firm:
Masahiko Amagai