Title:
VERTICAL BATCH FURNACE ASSEMBLY COMPRISING COOLING GAS SUPPLY
Document Type and Number:
Japanese Patent JP2021174992
Kind Code:
A
Abstract:
To provide a vertical batch furnace assembly comprising a cooling gas supply.SOLUTION: A vertical batch furnace assembly 10 comprises a core tube 12, an outer casing 16, a cooling chamber bounded and enclosed by the outer casing and the core tube, and at least one cooling gas supply emitting into the cooling chamber. The core tube 12 has an elongated circumferential wall 14 extending in a longitudinal direction, and is configured to accommodate wafers for processing in the vertical batch furnace. The outer casing 16 extends around the core tube and comprises a heating element 18 for applying thermal treatment to wafers accommodated in the core tube. The at least one cooling gas supply comprises at least one cooling gas supply opening 26 which is arranged such that the cooling gas enters the cooling chamber in a flow direction which is substantially tangent to the circumferential wall.SELECTED DRAWING: Figure 1
Inventors:
MELVIN VERBAAS
CHRISTIANUS G M DE RIDDER
CHRISTIANUS G M DE RIDDER
Application Number:
JP2021071864A
Publication Date:
November 01, 2021
Filing Date:
April 21, 2021
Export Citation:
Assignee:
ASM IP HOLDING BV
International Classes:
H01L21/31; F27B17/00; F27D9/00
Attorney, Agent or Firm:
Yasuhiko Murayama
Shinya Mitsuhiro
Tatsuhiko Abe
Shinya Mitsuhiro
Tatsuhiko Abe