Title:
VESSEL FOR PROCESSING MATERIAL
Document Type and Number:
Japanese Patent JPS61107091
Kind Code:
A
Inventors:
ROBAATO DONARUDO MAKINESU
ROBAATO RUISU ROO
HEREN RI IE
ROBAATO RUISU ROO
HEREN RI IE
Application Number:
JP15529985A
Publication Date:
May 24, 1986
Filing Date:
July 16, 1985
Export Citation:
Assignee:
IBM
International Classes:
H05K3/34; C21D9/00; F27B9/04; F27B9/26; F27B9/30; F27D3/12; F27D5/00; H01L21/322; F27D1/00; (IPC1-7): F27B9/30; F27D3/12; H01L21/22; H01L23/02; H05K3/34
Attorney, Agent or Firm:
Fumio Shinoda
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