Title:
振動トランスデューサおよび振動トランスデューサの製造方法
Document Type and Number:
Japanese Patent JP4946796
Kind Code:
B2
Abstract:
A vibration transducer (or a pressure transducer) is constituted of a cover, a plate, a diaphragm, and a substrate having a back cavity. The diaphragm is positioned above the substrate so as to cover the opening of the back cavity. The plate has a radial gear-like shape constituted of a center portion positioned just above the diaphragm and a plurality of joints. The cover horizontally surrounds the plate with slits therebetween so that the cover is electrically separated from the plate and is positioned above the periphery of the diaphragm. A plurality of pillar structures joins the plurality of joints of the plate so as to support the plate above the diaphragm with a gap layer therebetween. By reducing the widths of slits, it is possible to prevent foreign matter from entering into the air layer between the plate and the diaphragm.
Inventors:
Toshihisa Suzuki
Application Number:
JP2007280597A
Publication Date:
June 06, 2012
Filing Date:
October 29, 2007
Export Citation:
Assignee:
Yamaha Corporation
International Classes:
H04R19/04; B81B3/00; B81C99/00; H01L29/84; H04R31/00
Domestic Patent References:
| JP2007228352A | ||||
| JP2007208986A | ||||
| JP200767893A | ||||
| JP2005244094A |
Attorney, Agent or Firm:
knowledge partners Patent business corporation
Dai Yoshida
Wataru Iwakami
Dai Yoshida
Wataru Iwakami