Title:
振動制御装置
Document Type and Number:
Japanese Patent JP4095480
Kind Code:
B2
Abstract:
The present invention relates to a vibration controller for driving those movable parts, such as linear motor and other movable components, formed on a structural unit. It has a simple structure to deal with the counter forces generated during the driving of the movable parts and aims to limit the vibrations of the structural unit and provide excellent precision in the positioning of the movable parts. Two vibration limiters (32A, 32B) are installed between a base (33) and the floor (31). A reaction actuator (42), consisting of a linear motor stator (37) and a linear motor moving unit (38), is installed at a position in the same distance (H1, H2) to a supporting unit (36), formed in one unit with the floor (31), along two vertical directions (y1, y2). A control mean (45) outputs an unique driving signal to control the reaction actuator (42) via a driving loader (35) and a gain compensator (44).
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Inventors:
Makoto Kaneko
Yoshiyuki Tomita
Yoshiyuki Tomita
Application Number:
JP2003092300A
Publication Date:
June 04, 2008
Filing Date:
March 28, 2003
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F16F15/02; G05D19/02; G03F7/20; H02K33/16
Domestic Patent References:
| JP2001093798A | ||||
| JP2001140972A | ||||
| JP2001242937A |
Attorney, Agent or Firm:
Tadahiko Ito