To make relative displacement in an axial direction easily permissible also realize compactly by a simple structure a seal function relating to an external space in an arranging region of an electromagnetic force generating means between a shaft member and an outer cylinder member, while high accurately positioning in a shaft right angle direction the shaft member and the outer cylinder member influenced by relative exciting force in an axial direction by the electromagnetic force generating means.
At least two sheets of plate springs 16, 16 provided with a through hole 48 are arranged to be separated in an axial direction between a shaft member 12 and an outer cylinder member 14. Further, the plate spring 16 is coated with a rubber elastic film 56, a cover rubber film covering the through hole 48 is formed, also a seal rubber is formed in an internal/external peripheral edge part of the plate spring 16, the internal/external peripheral edge part of thus formed plate spring 16 are interposition pressure fixed in an axial direction relating to the shaft member 12 and the outer cylinder member 14 by interposing the seal rubber. In this way, the plate spring 16 positioning the shaft member 12 and the outer cylinder member 14 in a shaft right angle direction while permitting relative displacement in the axial direction is utilized, an arranging region of an electromagnetic force generating means is sealed relating to an external space.
GOTO KATSUHIRO
HAGINO YOSHIHIKO
