To realize the suitable control for each motion mode by outputting a driving force command to only two actuators for generating driving force in the X direction or the Y direction of an X-Y stage to be placed on a vibration controlling stand in relation to an input signal having the degree of freedom for once rotating a horizontal motion mode distributing device around a vertical axis.

The step-and-repeat operation of an X-Y stage 17 is generally performed by taking an x-axis or a y-axis as a main axis. The motion mode in this case takes either the x-axis direction or the y-axis direction as the main. The motion mode distributing formula is selected by the main step direction so that the motion mode distribution for decreasing load of actuators 2b, 2d for generating driving force in the x-axis direction may be adopted when the x-axis direction is taken as the main, the motion mode distribution for decreasing load of 2a, 2c for driving force in the y-axis direction may be adopted when the y-axis direction is taken as the main. Therefore, the actuators are not saturated, and control for each motion mode can be suitably and effectively realized.