Title:
振動検出システム
Document Type and Number:
Japanese Patent JP4234220
Kind Code:
B2
Abstract:
The detector comprises layers on a transparent substrate, with at least one of the layers generating electrical current in response to a light beam. The combination of the transparent substrate, and the layers has sufficient transparency to allow some of the light beam entering the detector to pass through it preferably to other detectors. Also claimed is a vibration detection system comprising a vibration susceptible structural element to which the position sensitive beam detectors are attached.
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Inventors:
Warren Bee Jackson
Mark H. Im
Andrew A. Berlin
Mark H. Im
Andrew A. Berlin
Application Number:
JP2889298A
Publication Date:
March 04, 2009
Filing Date:
February 10, 1998
Export Citation:
Assignee:
XEROX CORPORATION
International Classes:
G01B11/00; B41J29/08; F16F15/02; G01B11/03; G01B11/16; G01H9/00; G05D19/00; H01L25/04; H01L31/02; H01L31/0216; H01L31/0224; H01L31/105; H01L31/101
Domestic Patent References:
| JP58068611A | ||||
| JP61239164A | ||||
| JP52099374U | ||||
| JP5079531A |
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Kato Kazunori
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