Title:
振動デバイス、電子機器および移動体
Document Type and Number:
Japanese Patent JP7451959
Kind Code:
B2
Abstract:
A vibration device includes a substrate having a first surface and a second surface at an opposite side to the first surface, a vibration element disposed on the first surface, a first through electrode which penetrates the substrate, and is configured to electrically couple the power supply interconnection disposed on the second surface and the first circuit block disposed on the first surface, and a second through electrode which penetrates the substrate, and is configured to electrically couple the power supply interconnection and the second circuit block including an analog circuit disposed on the first circuit, wherein R1>R4 and R2>R4, in which R1 is an electric resistance of the first through electrode, R2 is an electric resistance of the second through electrode, and R4 is an electric resistance of a zone of the power supply interconnection coupling the first through electrode and the second through electrode.
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Inventors:
Koichi Mizugaki
Application Number:
JP2019211164A
Publication Date:
March 19, 2024
Filing Date:
November 22, 2019
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H03B5/32; H01L21/822; H01L27/04
Domestic Patent References:
| JP2019193052A | ||||
| JP2009071151A | ||||
| JP2014158157A | ||||
| JP2017139717A | ||||
| JP2006054269A | ||||
| JP2016025452A | ||||
| JP2016025199A | ||||
| JP2015090973A |
Attorney, Agent or Firm:
Satoshi Nakai
Hiroki Matsuoka
Masayuki Imamura
Hiroki Matsuoka
Masayuki Imamura
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