Title:
VIBRATION ELEMENT, VIBRATOR, ELECTRONIC DEVICE, AND MOVING BODY
Document Type and Number:
Japanese Patent JP2015102331
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a vibration element and a vibrator having excellent impact resistance, and to provide a highly reliable electronic device and moving body which are equipped with the vibration element.SOLUTION: The vibration element comprises a base part 21, a coupling arm 231 extending from the base part 21, and drive arms 241, 242 extending from the coupling arm 231. The coupling arm 231 has coupling arm-use tapered parts 2314a, 2314b provided in a base part-side connection part 2312 connecting a coupling arm-use arm part 2311 and the base part 21, and coupling arm-use tapered parts 2315a, 2315b provided in a vibration arm-side connection part 2313 connecting the coupling arm-use arm part 2311 and drive arms 241, 242, where, when the width of the coupling arm-use arm part 2311 is expressed by a and the lengths of the coupling arm-use tapered parts 2314a, 2314b, 2315a, 2315b extending along the width direction of the coupling arm-use part 2311 are expressed by b1, the relationship a≤b1 is satisfied.
Inventors:
OGURA SEIICHIRO
YAMAGUCHI KEIICHI
NISHIZAWA RYUTA
KIKUCHI TAKAYUKI
YAMAGUCHI KEIICHI
NISHIZAWA RYUTA
KIKUCHI TAKAYUKI
Application Number:
JP2013240697A
Publication Date:
June 04, 2015
Filing Date:
November 21, 2013
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01C19/5607; H01L41/047; H01L41/053; H01L41/113
Attorney, Agent or Firm:
Masahiko Ueyanagi
Kazuaki Watanabe
Kazuaki Watanabe