To effectively suppress vibration of a vibration elimination base of a vibration eliminator composed of a plurality of supporting devices provided with actuators for applying driving force to a vibration elimination base by arranging the actuators so as to apply damping force to the vibration elimination base for suppressing the vibration.
Support devices 1 a to 1b are arranged on four corners of a vibration elimination base, and each composed of actuators 2a to 2d for applying driving force to the vibration elimination base, and a vibration sensor for sensing horizontal vibration of the vibration elimination base. The actuators 2a to 2d are so arranged that a conditional number of a matrix WfA is minimum in a formula of WfAfact=fpnod which is effected between actuator thrust fact generated by the actuators 2a to 2d and vibration elimination base driving force fnod applied to the vibration elimination base as synthetic force, and obtained by replacing regular vibration elimination base driving force fpnod regularized by the maximum value fnod-nax of the driving force with operation mode distribution formula.