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Title:
VIBRATION ISOLATION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2009016402
Kind Code:
A
Abstract:

To provide a vibration isolation apparatus capable of detecting occurrence of an earthquake without needing an earthquake detection sensor nor stopping acceleration feedback loop control.

This active vibration isolation apparatus includes: a vibration isolation stand for mounting an apparatus thereon; an air spring supporting the vibration isolation stand; an actuator device driving the air spring; a linear motor device for vibration isolation; a position measurement means measuring the position of the vibration isolation stand; a vibration measurement means measuring vibration of the vibration isolation stand; and a control device of the actuator device and the linear motor device for vibration isolation having a position feedback loop based on the output of the position measurement means and an acceleration feedback loop based on the output of the vibration measurement means; and is characterized by detecting the earthquake by a square integrated value of a control current of the acceleration feedback loop upon earthquake occurrence.


Inventors:
YOSHIMURA TAKUMA
Application Number:
JP2007173514A
Publication Date:
January 22, 2009
Filing Date:
June 29, 2007
Export Citation:
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Assignee:
CANON KK
International Classes:
H01L21/027; F16F15/02; F16F15/027; G05D19/02
Domestic Patent References:
JPH11294520A1999-10-29
JP2002247891A2002-08-30
JPH03265734A1991-11-26
JP2008256155A2008-10-23
JP2006138769A2006-06-01
JPH01242846A1989-09-27
JPS5970143A1984-04-20
JPH09215388A1997-08-15
Attorney, Agent or Firm:
Kazunori Saito
Tetsuya Ito