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Title:
VIBRATION ISOLATION EQUIPMENT
Document Type and Number:
Japanese Patent JPH10115341
Kind Code:
A
Abstract:

To adjust the height of level by a variable adjustment parameter, and to improve a control characteristic, by installing an electric control-type flow control valve which is controlled through an electronic controller on the basis of an output signal of a non-contact operation-type distance sensor, on a high pressure air supply passage of an air spring.

An object 1 is supported on a base 3 through an air spring 2 for the vibration isolation, and an induction-type sensor 4 as a distance sensor, is installed therebetween. And the sensor signal is input to the electronic controller 5, and an output signal of the electronic controller 5 is supplied to an electric control-type flow control valve 6 installed on a high pressure air supplying passage 7 of the air spring 2, to control the high pressure air supplying amount to the air spring 2. The induction-type sensor 4, the electronic controller 5, and the electric control-type flow control valve 6 form an adjusting circuit for adjusting the level of the object 1 without using the mechanical shunt to the base 3, so that the control characteristic of the vibration isolation, can be improved.


Inventors:
HOGENKAMP DETLEF
Application Number:
JP20967297A
Publication Date:
May 06, 1998
Filing Date:
July 18, 1997
Export Citation:
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Assignee:
LEICA MIKROSKOPIE & SYST GMBH
International Classes:
G12B9/08; B23Q15/22; F16F9/02; F16F9/50; F16F15/02; F16F15/027; G05D19/02; (IPC1-7): F16F15/02; F16F9/02; F16F9/50; G12B9/08
Attorney, Agent or Firm:
Asato Kato