Title:
VIBRATION PROCESSOR, STAGE DRIVE UNIT, VIBRATION PROCESSING METHOD, AND VIBRATION PROCESSING PROGRAM
Document Type and Number:
Japanese Patent JP2023128472
Kind Code:
A
Abstract:
To provide a vibration processor making it possible to further upgrade the precision of an actuator.SOLUTION: A vibration processor 3 includes an X actuator 120, a vibration data collection unit 31 that collects vibration data when a Y actuator 130 is not driven, a peak frequency identification unit 32 that identifies at least one of peak frequencies, at which a maximal value appears, through frequency analysis of vibration data, a peak frequency output unit 33 that outputs a peak frequency, and an object-of-suppression frequency designation unit 35 that designates as an object-of-suppression frequency a peak frequency, which is outputted by the peak frequency output unit 33, for a filter 4 capable of suppressing a frequency component of a predetermined object-of-suppression frequency when the X actuator 120 and Y actuator 130 are not driven.SELECTED DRAWING: Figure 3
Inventors:
TAKAHARA DAICHI
YANAGAWA ATSUSHI
KONDO AKIRA
WATANABE MARINO
YANAGAWA ATSUSHI
KONDO AKIRA
WATANABE MARINO
Application Number:
JP2022032833A
Publication Date:
September 14, 2023
Filing Date:
March 03, 2022
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
G05D3/12
Attorney, Agent or Firm:
Kenki Morishita
Teruo Tomisho
Teruo Tomisho
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