PURPOSE: To provide a vibration remover of high performance for reducing vibration by connecting a pneumatic cylinder and a coil actuator in series to influence generating force thereof to a surface plate, and making its force points to agree.

CONSTITUTION: For removing vibration while holding a position of a surface plate 2 in fixed height, air of specified pressure is input to an air input/output part 16 to also flow a current in a coil actuator 3 by a control means, and a drive shaft 22 of the surface plate 2 is energized. The coil actuator 3 thus obtained is formed into a structure of arranging an air spring 1a, damper 1b and the coil actuator 3 in series, by vertically providing a coil 3b in a base mount further fitted to float in a float fitting hole 23 provided to be recessed in the surface plate and by forming the coil actuator between itself and a magnet 3a, and force of these spring, damper and coil actuator acts in almost the same position on a table 21 of the surface plate 2.