To provide a vibration suppression controller capable of suppressing vibration caused by torque ripple of a reduction gear by estimating and correcting amplitude and phase of fluctuating vibration caused by torque ripple of the reduction gear that is contained in the state value of a motor during operation even if they fluctuates during operation.
The vibration suppression controller comprises a vibration component calculating means 2 which calculates vibration component contained in a motor state value from a difference between the state value of a motor which drives axes of a mechanical system and a predicted value of the state value, an amplitude phase estimating means 3 which sequentially estimates amplitude and phase of the ripple generated at a motor 15 due to a reduction gear 16 based on the output of the vibration component calculating means 2 and motor displacement, and a corrective value calculating means 4 which calculates a corrective value of the motor state value from the estimated amplitude and phase and the motor displacement. Thus, the motor state value which is feedback-controlled is corrected based on the corrective value.
| WO/2001/021979 | STAGE DEVICE |
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Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order
Kazuhiro Oyaku
Shunichi Ueda
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