Title:
振動形MEMSスイッチ及びその製造方法
Document Type and Number:
Japanese Patent JP4267600
Kind Code:
B2
Abstract:
A vibration type MEMS switch and a method of fabricating the vibration type MEMS switch. The vibration type MEMS switch includes a vibrating body supplied with an alternating current voltage of a predetermined frequency to vibrate in a predetermined direction; and a stationary contact point spaced apart from the vibrating body along a vibration direction of the vibrating body. When a direct current voltage with a predetermined magnitude is applied to the stationary contact point, a vibration margin of the vibrating body is increased, the vibrating body contacts the stationary contact point and the vibration type MEMS switch is turned on. A first substrate is bonded to a second substrate to isolate the vibrating body in a sealed vacuum space. The vibration type MEMS switch is turned on and/off by a resonance.
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Inventors:
Lee Wen Chul
Park Park
Kibun Chung
Park Park
Kibun Chung
Application Number:
JP2005209426A
Publication Date:
May 27, 2009
Filing Date:
July 20, 2005
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO.,LTD.
International Classes:
H01H59/00; B81B3/00; B81C1/00; H01H49/00
Domestic Patent References:
| JP2002036197A | ||||
| JP2000090801A | ||||
| JP11505959A | ||||
| JP8509093A | ||||
| JP2002326197A | ||||
| JP2004053839A | ||||
| JP2004127871A |
Foreign References:
| WO2004046019A1 | ||||
| US20030090346 | ||||
| WO2004020329A1 |
Attorney, Agent or Firm:
Yukio Ono
Tomoko Inazumi
Tomoko Inazumi