Title:
Vibration type angular velocity sensor
Document Type and Number:
Japanese Patent JP6330501
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a vibration type angular velocity sensor with which it is possible to suppress the unnecessary vibration of a movable part and improve the accuracy of detection.SOLUTION: A drive part 51 including a drive thin-film configured with a piezoelectric film for driving the vibration of driving-cum-inspection weights 31, 32 is disposed on a drive beam 43. Also, a detection part 53 for detecting the displacement of a detection beam due to the application of angular velocity is disposed on a detection beam 41. Furthermore, a control part 52 including a control thin-film configured with a piezoelectric film for generating a vibration for suppressing the unnecessary vibration causing the driving-cum-inspection weights 31, 32 to move in the normal direction relative to the plane surface of a substrate is disposed on a drive beam 42.
Inventors:
Tomoya Shiromori
Application Number:
JP2014121689A
Publication Date:
May 30, 2018
Filing Date:
June 12, 2014
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01C19/574; G01C19/5607; H01L41/113
Domestic Patent References:
| JP2004361320A | ||||
| JP2001304872A | ||||
| JP2004085361A | ||||
| JP2002277248A | ||||
| JP8054242A | ||||
| JP9105634A | ||||
| JP2008224630A | ||||
| JP2008256669A | ||||
| JP2006017569A |
Foreign References:
| US20020033653 |
Attorney, Agent or Firm:
Patent Business Corporation Yuai Patent Office